Radial Line Slot Antenna Plasma
The antenna aperture in this case. A radial line slot antenna (RLSA) for surface-wave-coupled plasma (SWP) is a promising candidate to this end. A novel slot arrangement in the aperture, consisting of densely arrayed transverse slots, was fabricated. The slot plate 40 is a substantially circular metal plate having a multiple number of slot pairs. The antenna 14 is implemented by, for example, a radial line slot antenna. 2 is a plan view illustrating an example of the slot plate 40. The slot plate 40 is provided with a multiple number of slot pairs 40a, as shown in FIG. Radial Line Slot Antenna (RLSA) DBS. Reception.DBS: Direct Broadcast from Satellite. DBS Reception Antenna High Efficiency, 12GHz, 34dBi, Antenna Efficiency 85% （in practical use）. 30cm Diameter Order Large Aperture Plasma Equipment (8.3GHz) （in practical use）.
Radial Line Slot Antenna Plasma Tv
Simulations of the Plasma Structure of a Radial Line Slotted Antenna Plasma Source
Radial Line Slot Antenna Plasma Cutter
Abstract
The Radial Line Slot Antenna (RLSA) plasma source couples microwave power through a slot antenna structure and window to a plasma characterized by a generation zone adjacent to the window and a diffusion zone that contacts a substrate. The diffusion zone is characterized by a very low electron temperature. This property renders the source useful for soft etch applications and thin film processing for which low ion energy is desirable. Another property of the diffusion zone is that the plasma density falls from the axis to the walls. Static magnetic fields at the walls of other plasma sources have been shown to impede electron losses to walls lowering their loss rate and changing the plasma profile. In this presentation, the impact of different magnetic field configurations on the diffusion zone plasma structure will be described. To do this, an ambipolar-electromagnetic field model previously used to describe RLSA plasmas is modified to account for the impact of magnetic fields on transport coefficients and plasma chemistry. Resonant and other effects of magnetic field are also discussed.
- Publication:
- Pub Date:
- October 2011
- Bibcode:
- 2011APS..GECQR1093Y